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N5 yield regression Open in Drive Files Activity Share
You09:12

Die yield on N5 dropped 4 points week over week. Find where it started and which lots are exposed.

Context09:12

Pulling PCM and inline metrology from the MES. Correlating the drop against process steps.

N5 yield regression
Done in 3 min 11 s
  1. Pull die yield N5 · 8 weeks, 1,902 wafers
  2. Cluster wafer-map signatures, edge ring
  3. Correlate against step log, litho focus
  4. List exposed lots, 11 lots
  5. Wrote n5-yield-8d-w22.docx, 96 KB
  6. Wrote exposed-lots-n5.xlsx, 24 KB
Wrote n5-yield-8d-w22.docx, 96 KB
n5-yield-8d-w22.docxworkspaces/h/n5-yield-regressionDoc · 96 KB
Wrote exposed-lots-n5.xlsx, 24 KB
exposed-lots-n5.xlsxworkspaces/h/n5-yield-regressionSheet · 24 KB
Context09:15

The drop tracks the litho focus offset on tool LITHO-3 starting Tuesday. Edge-ring signature on the wafer maps. 11 lots exposed; writeup and lot list attached.

n5-yield-8d-w22.docx96 KB · 8D writeupexposed-lots-n5.xlsx11 lots · PCM deltas
You09:21

Hold the 11 lots and notify the litho area owner.

Context09:21

Lots flagged on hold in the MES. Draft notice ready for the LITHO-3 area owner.

Place 11 lots on hold?
Sets MES hold on the exposed lots and pings the litho area owner.
Place holdReview first
Ask anything
CAuto
n5-yield-8d-w22.docx
Document

N5 yield regression

Sep 10, 2026 · N5 yield regression · Context

The drop tracks the litho focus offset on tool LITHO-3 starting Tuesday. Edge-ring signature on the wafer maps. 11 lots exposed; writeup and lot list attached.

Lots flagged on hold in the MES. Draft notice ready for the LITHO-3 area owner.

What was checked

Pull die yield (N5 · 8 weeks): 1,902 wafers

Cluster wafer-map signatures: edge ring

Correlate against step log: litho focus

N5 yield regression Files Share
You09:12

Die yield on N5 dropped 4 points week over week. Find where it started and which lots are exposed.

Context09:12

Pulling PCM and inline metrology from the MES. Correlating the drop against process steps.

N5 yield regression
Done in 3 min 11 s
  1. Pull die yield N5 · 8 weeks, 1,902 wafers
  2. Cluster wafer-map signatures, edge ring
  3. Correlate against step log, litho focus
  4. List exposed lots, 11 lots
  5. Wrote n5-yield-8d-w22.docx, 96 KB
  6. Wrote exposed-lots-n5.xlsx, 24 KB
Wrote n5-yield-8d-w22.docx, 96 KB
n5-yield-8d-w22.docxworkspaces/h/n5-yield-regressionDoc · 96 KB
Wrote exposed-lots-n5.xlsx, 24 KB
exposed-lots-n5.xlsxworkspaces/h/n5-yield-regressionSheet · 24 KB
Context09:15

The drop tracks the litho focus offset on tool LITHO-3 starting Tuesday. Edge-ring signature on the wafer maps. 11 lots exposed; writeup and lot list attached.

n5-yield-8d-w22.docx96 KB · 8D writeupexposed-lots-n5.xlsx11 lots · PCM deltas
You09:21

Hold the 11 lots and notify the litho area owner.

Context09:21

Lots flagged on hold in the MES. Draft notice ready for the LITHO-3 area owner.

Place 11 lots on hold?
Sets MES hold on the exposed lots and pings the litho area owner.
Place holdReview first
Ask anything
CAuto

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Files

10 items New
FiltersType People Modified Sort: Name

4 results · matched on names and inside the files

NameOwnerModifiedLocation
n5-yield-8d-w22.docxr. okafor1h agoN5 yield regression
Page 1 SummaryThe drop tracks the litho focus offset on tool LITHO-3 starting Tuesday.
exposed-lots-n5.xlsxr. okafor2h agoN5 yield regression
Page 1 Summary11 lots exposed; writeup and lot list attached.
yield-regression.xlsxr. okafor3h agoProjects
Page 1 SummaryPulling PCM and inline metrology from the MES.
wafer-map-cluster-scan.docxr. okafor5h agoShared with team
Page 1 SummaryDraft notice ready for the LITHO-3 area owner.

Files

10 items New
FiltersSort: Name

4 results · matched on names and inside the files

NameModified
n5-yield-8d-w22.docx1h ago
Page 1 SummaryThe drop tracks the litho focus offset on tool LITHO-3 starting Tuesday.
exposed-lots-n5.xlsx2h ago
Page 1 Summary11 lots exposed; writeup and lot list attached.
yield-regression.xlsx3h ago
Page 1 SummaryPulling PCM and inline metrology from the MES.
wafer-map-cluster-scan.docx5h ago
Page 1 SummaryDraft notice ready for the LITHO-3 area owner.

A yield excursion, start to finish. Ask, trace, file.

yield-regressionProcess engineer traces a die-yield drop to a litho step and files the 8D.4
Messages FilesDetails
Today
r. okafor09:12

@Context Die yield on N5 dropped 4 points week over week. Find where it started and which lots are exposed.

Context09:12
N5 yield regression
Done in 3 min 11 s
Wrote n5-yield-8d-w22.docx, 96 KB
n5-yield-8d-w22.docxworkspaces/h/yield-regressionDoc · 96 KB
Wrote exposed-lots-n5.xlsx, 24 KB
exposed-lots-n5.xlsxworkspaces/h/yield-regressionSheet · 24 KB
2
Priya Natarajan09:21

Hold the 11 lots and notify the litho area owner.

Context09:21

Lots flagged on hold in the MES. Draft notice ready for the LITHO-3 area owner.

Send a message in #yield-regression
yield-regression4
Messages FilesDetails
Today
r. okafor09:12

@Context Die yield on N5 dropped 4 points week over week. Find where it started and which lots are exposed.

Context09:12
N5 yield regression
Done in 3 min 11 s
Wrote n5-yield-8d-w22.docx, 96 KB
n5-yield-8d-w22.docxworkspaces/h/yield-regressionDoc · 96 KB
Wrote exposed-lots-n5.xlsx, 24 KB
exposed-lots-n5.xlsxworkspaces/h/yield-regressionSheet · 24 KB
2
Priya Natarajan09:21

Hold the 11 lots and notify the litho area owner.

Context09:21

Lots flagged on hold in the MES. Draft notice ready for the LITHO-3 area owner.

Send a message in #yield-regression

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